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Publications information icon
Introduction: basic features and historical development of
atomic
layer
deposition
Peer-reviewed
Niinistö, Jaakko; Niinistö, Lauri
Wiley-VCH Verlag
2012
Publications information icon
Residual stress in thin films made by
atomic
layer
deposition
Ylivaara, Oili; Puurunen, Riikka
HERALD WG2 Workshop & 4th Annual Seminar of Finnish Center of Excellence in
Atomic
Layer
Deposit...
2016
Publications information icon
Atomic
layer
deposition
of titanium nitride
layer
on porous silicon supercapacitor electrodes
Grigoras, Kestutis; Keskinen, J.; Yli-Rantala, Elina; Laakso, S.; Välimäki, H.; Kauranen, P.; Ahopel...
14th International Conference on
Atomic
Layer
Deposition
, ALD 2014
2014
Publications information icon
ZrO
2
and HfO
2
Thin Films from Cyclopentadienyl Precursors by
Atomic
Layer
Deposition
Peer-reviewed
Niinistö, Jaakko; Putkonen, Matti; Niinistö, Lauri
-
2003
Publications information icon
Atomic
layer
deposition
(ALD) of high quality Ga2O3 thin films from a dimeric dialkylamido-bridged gallium complex
Peer-reviewed
Dezelah IV, Charles L.; Niinistö, Jaakko; Putkonen, Matti; Arstila, Kai; Winter, Charles H.; Niinist...
American Vacuum Society
2005
Publications information icon
On the early history of
atomic
layer
deposition
: most significant works and applications
Aarik, Jaan; Ahvenniemi, Esko; Akbashev, Andrew R.; Ali, Saima; Bechelany, Mikhael; Berdova, Maria; ...
16th International Conference on
Atomic
Layer
Deposition
, ALD 2016
2016
Publications information icon
Overview of early publications on
Atomic
Layer
Deposition
Peer-reviewed
Aarik, Jaan; Akbashev, Andrew R.; Cameron, David; Elam, Jeffrey; Elliott, Simon; Gottardi, Gloria; G...
-
2014
Publications information icon
Atomic
Layer
Deposition
DOI
10.1002/0471238961.koe00059
van Ommen, J. Ruud; Goulas, Aristeidis; Puurunen, Riikka L.
JOHN WILEY & SONS
2021
Publications information icon
Atomic
Layer
Deposition
of Biomimetic Ca-P-O Films
Peer-reviewed
Putkonen, Matti; Sajavaara, Timo; Rahkila, Paavo; Whitlow, Harry James; Cheng, Sulin; Niinistö, Laur...
-
2007
Publications information icon
Gas and moisture barrier on bio-based packaging materials by
atomic
layer
deposition
Hirvikorpi, Terhi; Vähä-Nissi, Mika; Mustonen, Tuomas; Harlin, Ali; Karppinen, Maarit
-
2010
Introduction: basic features and historical development of
atomic
layer
deposition
Peer-reviewed
2012
Residual stress in thin films made by
atomic
layer
deposition
2016
Atomic
layer
deposition
of titanium nitride
layer
on porous silicon supercapacitor electrodes
2014
ZrO
2
and HfO
2
Thin Films from Cyclopentadienyl Precursors by
Atomic
Layer
Deposition
Peer-reviewed
2003
Atomic
layer
deposition
(ALD) of high quality Ga2O3 thin films from a dimeric dialkylamido-bridged gallium complex
Peer-reviewed
2005
On the early history of
atomic
layer
deposition
: most significant works and applications
2016
Overview of early publications on
Atomic
Layer
Deposition
Peer-reviewed
2014
Atomic
Layer
Deposition
DOI
10.1002/0471238961.koe00059
2021
Atomic
Layer
Deposition
of Biomimetic Ca-P-O Films
Peer-reviewed
2007
Gas and moisture barrier on bio-based packaging materials by
atomic
layer
deposition
2010
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